Magnetron Sputtering Vacuum Coating Plant

Following are the Main Features of Magnetron Sputtering Vacuum Coating Plant :-
1. This machine has a fast depositing rate and little temperature rise, being able to well restrain sparking and target intoxication.
2. The high energy released during sputtering significantly enhances film density and adhesion.
3. Equipped with a touch screen, this machine can be controlled fully automatically or manually, which can
be toggled at any time.
4. The vacuum chamber has a huge volume and high load capacity, which results in high production efficiency.
5. The work piece rack is a revolution structure, which can be set for automatic rotation clockwise or counterclockwise, producing fairly even film.
6. The entire machine has a rational configuration, low air suction rate, low noise, and low energy consumption.
Main Configuration:
1. The chamber, valves and pipeline of this vacuum coating machine are all made of stainless steel, Chamber size I 1000~1800mm;
2. Vacuum system consist of high vacuum valve, high vacuum diffusion pump or molecular pump, roots pump, rotary piston pump, slide vane rotary vacuum pump;
3. Coating system use 28 sets plane-target or Column-target and 28sets power source;
4. Use one fast cycle water vapor cryopump;
5. Inflating system has 14 sets mass flow control instrument and a gas flow display;
6. Cooling system: there is a water pressure alarm device on this machine