Plasma Surface Treatment System Femto

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Femto low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of 2 to 3 litres of this plasma system offers enough space to serve laboratory and small series production.

Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised.

Fields of application:
VOC-free cleaning of organic residues on silicone, plastic, copper, nickel, ...
Activation before painting, gluing, potting, ...
Etching of PTFE, photoresist, oxide layers, ...
Super-hydrophobic and -hydrophilic coatings

Main features:
Table-top or floor-standing enclosure
Vacuum chambers: Stainless steel, aluminium, borosilicate or quartz glass
Chamber volume: 2 - 3 litres
Gas supply: Needle valves or Mass Flow Controllers (MFCs)
Generator frequencies: 40 kHz / 0 - 100 W; 100 kHz / 0 - 500 W; 13.56 MHz / 0 - 200 W; 2.45 GHz / 0 - 300 W
Controls: Semi-automatic, rotary switch, Basic PC control (Windows CE), Full PC control (Windows 10 IoT)
Pressure measurement: Pirani, capacity manometer